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flag Lam Research and JSR Corporation partner on advanced chip-making tech, ending legal disputes.

flag Lam Research and JSR Corporation have formed a non-exclusive cross-licensing and collaboration agreement to advance semiconductor manufacturing, focusing on next-generation patterning technologies like dry resist for EUV lithography and materials for atomic layer etching and deposition. flag The companies will integrate JSR/Inpria’s resists and films with Lam’s etch and deposition technologies, working together on innovations including metal oxide resists, high NA EUV patterning for advanced chips, and new materials for next-gen processes. flag The partnership also resolves ongoing litigation between the parties.

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