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ACM Research ships its first Ultra Lith KrF track system to a leading Chinese semiconductor factory.
ACM Research has launched its first Ultra Lith KrF track system, designed for high-throughput semiconductor manufacturing.
The system, which expands ACM's lithography offerings, was shipped to a top Chinese logic wafer fab in September 2025.
It features 12 spin coaters, 12 developers, and 54 hot plates for advanced thermal control, with real-time process monitoring to enhance production efficiency.
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ACM Research envía su primer sistema de pista Ultra Lith KrF a una importante fábrica china de semiconductores.