ULVAC and SAL partner to develop plasma etching for large-scale thin-film lithium niobate manufacturing.
ULVAC and Silicon Austria Labs (SAL) have teamed up to develop plasma etching processes for manufacturing thin-film lithium niobate (TFLN) on a large scale. This material is crucial for advanced optical devices due to its high efficiency and low loss. Using ULVAC's plasma etching system, the partnership aims to improve TFLN's integration and scalability, addressing the increasing demand for higher data communication volumes.
4 months ago
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