Hitachi High-Tech Corporation releases LS9300AD, an advanced wafer inspection system for detecting particles and defects on non-patterned wafers, using dark-field laser scattering and DIC inspection.

Hitachi High-Tech Corporation has released the LS9300AD, an advanced wafer inspection system that detects particles and defects on non-patterned wafers' front and backside. The system uses dark-field laser scattering and a new DIC (Differential Interference Contrast) inspection function to improve defect detection, particularly for low-aspect microscopic defects. The LS9300AD aims to reduce inspection costs and improve yield for semiconductor manufacturers.